WB2.6 248nm Lithography of 2D Photonic Crystal Waveguide with Optical Proximity Correction

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WB2.6 248nm Lithography of 2D Photonic Crystal Waveguide with Optical Proximity Correction

WB2.6 248nm Lithography of 2D Photonic Crystal Waveguide with Optical Proximity Correction

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Title :

WB2.6 248nm Lithography of 2D Photonic Crystal Waveguide with Optical Proximity Correction

Conference:

Optical interconnects & VLSI photonics ; 2004 ; San Diego, Calif

Published in:

Optical interconnects & VLSI photonics ; 87-88

DIGEST OF THE IEEE LEOS SUMMER TOPICAL MEETINGS ; 2004

Publication date :

2004-01-01

Size :

2 pages

Remarks:

IEEE cat. no. 04TH8728. Held as part of the 2004 IEEE/LEOS Summer topical meeting

ISBN :

ISSN :

Type of media :

Conference paper

Type of material :

Print

Language :

English

Keywords :

Optical interconnects , VLSI photonics , IEEE , LEOS

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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