Title :

SiO~x thin films as material for uncooled microbolometer [5065-33]

Contributors:

Michailovskaya, K. (author) / Indutnyy, I. Z. (author) / Shepeliavy, P. E. (author) / Sizov, F. F. / Gumenjuk-Sichevska, J. V. / Kostyukevich, S. / International Society for Optical Engineering / National Academy of Sciences of Ukraine

Conference:

International conference; 6th, Material science and material properties for infrared optoelectronics ; 2002 ; Kiev, Ukraine

Material science and material properties for infrared optoelectronics ; 255-260

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 5065

Publication date :

2003-01-01

Size :

6 pages

ISBN :

0819448710

ISSN :

0277-786X

Type of media :

Conference paper

Type of material :

Print

Language :

English

Keywords :

material science , material properties , infrared optoelectronics , SPIE , semiconductor physics , optoelectronics , infra-red optoelectronics , optical engineers

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