Nd:YAG laser cleaning of ablation debris from excimer-laser-ablated polyimide [4595-59]

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Nd:YAG laser cleaning of ablation debris from excimer-laser-ablated polyimide [4595-59]

Gu, J. / Low, J. / Lim, P. K. / Lim, P. / SPIE

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Title :

Nd:YAG laser cleaning of ablation debris from excimer-laser-ablated polyimide [4595-59]

Contributors:

Gu, J. (author) / Low, J. (author) / Lim, P. K. (author) / Lim, P. (author) / Sidorin, Y. S. / Tang, D. / SPIE

Conference:

Conference, Photonic systems and applications ; 2001 ; Singapore

Published in:

Photonic systems and applications ; 293-300

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 4595

Publication date :

2001-01-01

Size :

8 pages

ISBN :

0819443255

ISSN :

0277-786X

Type of media :

Conference paper

Type of material :

Language :

English

Keywords :

photonic systems , SPIE , photonic applications

Gu, J. / Tay, E. / Lim, P. K. et al. | British Library Conference Proceedings | 2001

Analysis of dynamic characteristics of cw Nd:YAG laser [4595-05]

Xu, R. / Zhou, Q. / Chang, C. et al. | British Library Conference Proceedings | 2001

Laser-induced plasma-assisted ablation for glass microfabrication [4595-30]

Hong, M. H. / Sugioka, K. / Wu, D. J. et al. | British Library Conference Proceedings | 2001

Appearance and disappearance of double-peak structure in output power curves of cw Nd:YAG laser [4595-54]

Xu, R. / Zhou, Q. / Chang, C. et al. | British Library Conference Proceedings | 2001

Nr. 4595

DataCite | 1933

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