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    Photothermal deflection microscope with linear motor drive and its applications to NDE of microdevices [4416-98]

    Photothermal deflection microscope with linear motor drive and its applications to NDE of microdevices [4416-98]


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    Title :

    Photothermal deflection microscope with linear motor drive and its applications to NDE of microdevices [4416-98]

    Contributors:
    Miyamoto, K. (author) / Hoshimiya, T. (author) / Yamaguchi, I. / Optical Society of Japan / SPIE
    Conference:

    International conference, Optical engineering for sensing and nanotechnology ; 2001 ; Yokohama, Japan

    Published in:

    Optical engineering for sensing and nanotechnology ; 420-423

    PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 4416

    Publication date :

    2001-01-01

    Size :

    4 pages

    ISBN :

    081944121X

    ISSN :

    0277-786X

    Type of media :

    Conference paper

    Type of material :

    Print

    Language :

    English

    Keywords :

    optical engineering , nanotechnology , ICOSN , SPIE , sensing

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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