Title :

Binary deposition method using standard CMOS structural layers to fabricate optical gratings and microlenses [3795-93]

Contributors:

Yang, L.-J. (author) / Liu, P.-C. (author) / Kang, S.-W. (author) / Duh, W.-C. (author) / Chang, P.-Z. (author) / Lee, C.-K. (author) / Hwu, R. J. / Wu, K. / SPIE

Conference:

Conference, Terahertz and gigahertz photonics ; 1999 ; Denver, CO

Terahertz and gigahertz photonics ; 605-610

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 3795

Publication date :

1999-01-01

Size :

6 pages

ISBN :

0819432814

ISSN :

0277-786X

Type of media :

Conference paper

Type of material :

Print

Language :

English

Keywords :

terahertz photonics , SPIE , gigahertz photonics

© Metadata Copyright the British Library Board and other contributors. All rights reserved.