Title :

Dynamic measurement of tiny displacement by dimension reduction [2004-20]

Contributors:

Liu, Y. (author) / Xuong, J. (author) / He, G. (author) / Pryputniewicz, R. J. / Brown, G. M. / Juptner, W. P. O. / SPIE / Society for Experimental Mechanics

Conference:

Conference, Interferometry VI: applications ; 1993 ; San Diego; CA

Interferometry VI: applications ; 2004 ; 197-203

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 2004

Publication date :

1994-01-01

Size :

7 pages

ISBN :

0819412538

ISSN :

0361-0748

Type of media :

Conference paper

Type of material :

Print

Language :

English

Keywords :

interferometry , SPIE , SEM , experimental mechanics

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