Titel :

X-ray study of surfaces and interfaces [4449-31]

Beteiligte:

Asadchikov, V. E. (Autor:in) / Bukreeva, I. N. (Autor:in) / Duparre, A. (Autor:in) / Kozhevnikov, I. V. (Autor:in) / Krivonosov, Y. S. (Autor:in) / Morawe, C. (Autor:in) / Pyatakhin, M. V. (Autor:in) / Steinert, J. (Autor:in) / Vinogradov, A. V. (Autor:in) / Ziegler, E. (Autor:in)

Kongress:

Conference; 2nd, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2001 ; San Diego, CA

Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 253-264

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERINGG ; 4449

Erscheinungsdatum :

2001-01-01

Format / Umfang :

12 pages

ISBN :

0819441635

ISSN :

0277-786X

Medientyp :

Aufsatz (Konferenz)

Format :

Print

Sprache :

Englisch

Schlagwörter :

optical metrology , semiconductor industries , data storage industries

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