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    Novel condenser for EUV lithography ring-field projection optics [3767-33]

    Chapman, H. N. / Nugent, K. A. / SPIE | British Library Conference Proceedings | 1999
    Schlagwörter: EUV optics , X-ray optics , neutron optics

    Review of x-ray collimators for x-ray proximity lithography [3767-24]

    Lane, S. M. / Barbee, T. W. / Mrowka, S. J. et al. | British Library Conference Proceedings | 1999
    Schlagwörter: EUV optics , X-ray optics , neutron optics

    Recent development of doubly curved crystal focusing optics and their applications for micro XRF [3767-19]

    Chen, Z. W. / SPIE | British Library Conference Proceedings | 1999
    Schlagwörter: EUV optics , X-ray optics , neutron optics

    Liquid-target laser-plasma sources for EUV and x-ray lithography (Invited Paper) [3767-01]

    Hertz, H. M. / Berglund, M. / Hansson, B. A. M. et al. | British Library Conference Proceedings | 1999
    Schlagwörter: EUV optics , X-ray optics , neutron optics

    Experimental test of the de Broglie wave packet nature of the neutron [3767-50]

    Utsuro, M. / Ignatovich, V. K. / Geltenbort, P. W. et al. | British Library Conference Proceedings | 1999
    Schlagwörter: EUV optics , X-ray optics , neutron optics

    Curved-crystal three-axis neutron spectrometry with position-sensitive detection [3767-42]

    Popovici, M. / Stoica, A. / Yelon, W. B. et al. | British Library Conference Proceedings | 1999
    Schlagwörter: EUV optics , X-ray optics , neutron optics

    Optical constants of beryllium from photoabsorption measurements for x-ray optics applications [3767-36]

    Soufli, R. / Bajt, S. / Gullikson, E. M. et al. | British Library Conference Proceedings | 1999
    Schlagwörter: EUV optics , X-ray optics , neutron optics

    Lifetime studies of Mo/Si and Mo/Be multilayer coatings for extreme ultraviolet lithography [3767-32]

    Wedowski, M. / Bajt, S. / Folta, J. A. et al. | British Library Conference Proceedings | 1999
    Schlagwörter: EUV optics , X-ray optics , neutron optics

    New measurements with a perfect crystal cavity for neutrons [3767-48]

    Jakel, M. R. / Carlile, C. J. / Jericha, E. et al. | British Library Conference Proceedings | 1999
    Schlagwörter: EUV optics , X-ray optics , neutron optics

    High-power source and illumination system for extreme ultraviolet lithography [3767-20]

    Kubiak, G. D. / Bernardez, L. J. / Krenz, K. D. et al. | British Library Conference Proceedings | 1999
    Schlagwörter: EUV optics , X-ray optics , neutron optics

    Polycapillary collimator for laser-generated plasma source x-ray lithography [3767-05]

    Chen, Z. W. / Youngman, R. / Bievenue, T. et al. | British Library Conference Proceedings | 1999
    Schlagwörter: EUV optics , X-ray optics , neutron optics

    Development of a supermirror Doppler shifter for quasi-continuous ultracold neutron generation at pulsed neutron sources [3767-47]

    Utsuro, M. / Soyama, K. / Tajima, N. et al. | British Library Conference Proceedings | 1999
    Schlagwörter: EUV optics , X-ray optics , neutron optics

    Recent advances in EUV phase-shifting point diffraction interferometry [3767-22]

    Naulleau, P. / Goldberg, K. A. / Lee, S. H. et al. | British Library Conference Proceedings | 1999
    Schlagwörter: EUV optics , X-ray optics , neutron optics

    EUV spectroscopy of ultrafast capillary discharges [3767-52]

    Knight, L. V. / Turley, R. S. / Crawford, C. et al. | British Library Conference Proceedings | 1999
    Schlagwörter: EUV optics , X-ray optics , neutron optics

    Toward a high-average-power and debris-free soft x-ray source for microlithography pumped by a long-pulse excimer laser [3767-04]

    Bollanti, S. / Di Lazzaro, P. / Flora, F. et al. | British Library Conference Proceedings | 1999
    Schlagwörter: EUV optics , X-ray optics , neutron optics

    High-power x-ray point source for next-generation lithography [3767-03]

    Turcu, I. C. E. / Forber, R. A. / Grygier, R. K. et al. | British Library Conference Proceedings | 1999
    Schlagwörter: EUV optics , X-ray optics , neutron optics

    Focusing properties of x-ray polymer refractive lenses from SU-8 resist layer [5195-04]

    Snigirev, A. A. / Snigireva, I. / Drakopoulos, M. et al. | British Library Conference Proceedings | 2003
    Schlagwörter: synchrotron optics , optics

    Double gradient multilayers for broadband focusing [5195-01]

    Morawe, C. / Peffen, J.-C. / Dufresne, E. M. et al. | British Library Conference Proceedings | 2003
    Schlagwörter: synchrotron optics , optics

    Neutron multilayer structures for fundamental experiments in UCN optics [3767-49]

    Frank, A. I. / Balashov, S. V. / Bodnarchuk, V. I. et al. | British Library Conference Proceedings | 1999
    Schlagwörter: EUV optics , X-ray optics , neutron optics

    Experimental investigation of beryllium-based multilayer coatings for extreme ultraviolet lithography [3767-37]

    Bajt, S. / Behymer, R. D. / Mirkarimi, P. B. et al. | British Library Conference Proceedings | 1999
    Schlagwörter: EUV optics , X-ray optics , neutron optics

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