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    New procedure for the optical characterization of high-quality thin films [4099-16]

    Bosch, S. / Leinfellner, N. / Quesnel, E. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Al-Jumaily, G. A.

    Characteristics of tantalum oxynitride films prepared by rf magnetron sputtering [4099-30]

    Jong, C. A. / Chin, T. S. / SPIE | British Library Conference Proceedings | 2000
    Beteiligte: Al-Jumaily, G. A.

    New purged UV spectroscopic ellipsometer to characterize thin films and multilayers at 157 nm [4099-25]

    Boher, P. / Evrard, P. / Piel, J.-P. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Al-Jumaily, G. A.

    Standardization in optics characterization (Invited Paper) [4099-14]

    Ristau, D. / SPIE | British Library Conference Proceedings | 2000
    Beteiligte: Al-Jumaily, G. A.

    Microroughness analysis of thin film components for VUV applications [4099-13]

    Ferre-Borrull, J. / Duparre, A. / Steinert, J. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Al-Jumaily, G. A.

    Nondestructive film thickness measurement using atomic force microscopy at ultrasonic frequencies [4099-06]

    Crozier, K. B. / Yaralioglu, G. G. / Degertekin, F. L. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Al-Jumaily, G. A.

    Optical microscopy at sub-0.1-mum resolution for semiconductor applications [4099-03]

    Vollrath, W. / SPIE | British Library Conference Proceedings | 2000
    Beteiligte: Al-Jumaily, G. A.

    Rotating compensator spectroscopic ellipsometry (RCSE) and its application to high-k dielectric film HfO~2 [4099-27]

    Leng, J. / Li, S. / Opsal, J. L. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Al-Jumaily, G. A.

    In-situ ellipsometric measurements of thin film aluminum oxidation [4099-26]

    Lindmark, E. K. / Nowak, J. J. / Kief, M. T. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Al-Jumaily, G. A.

    Optical characterization of doping profiles in silicon [4099-04]

    Bernini, R. / Zeni, L. / Pierri, R. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Al-Jumaily, G. A.

    Multiscale mapping technique for the simultaneous estimation of absorption and partial scattering of optical coatings [4099-11]

    Gatto, A. / Commandre, M. / SPIE | British Library Conference Proceedings | 2000
    Beteiligte: Al-Jumaily, G. A.

    Investigation on total scattering at 157 nm and 193 nm [4099-09]

    Kadkhoda, P. / Welling, H. / Gunster, S. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Al-Jumaily, G. A.

    Calibration requirements for identifying and sizing wafer defects by scanner measurements [4099-38]

    Stover, J. C. / Scheer, C. A. / SPIE | British Library Conference Proceedings | 2000
    Beteiligte: Al-Jumaily, G. A.

    Numerical investigation of the resolution in solid immersion lens systems [4099-28]

    Bischoff, J. / Brunner, R. / SPIE | British Library Conference Proceedings | 2000
    Beteiligte: Al-Jumaily, G. A.

    Present and future interference microscope systems for magnetic head metrology [4099-21]

    Caber, P. J. / Olszak, A. G. / Ragan, C. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Al-Jumaily, G. A.

    Investigations of transmittance and reflectance in the DUV/VUV spectral range [4099-36]

    Kadkhoda, P. / Blaschke, H. / Kohlhaas, J. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Al-Jumaily, G. A.

    X-ray investigations of a near surface layer of metal samples [4099-33]

    Gilev, O. N. / Asadchikov, V. E. / Duparre, A. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Al-Jumaily, G. A.

    Optical testing of long cylindrical lenses by means of scanning deflectometry [4099-17]

    van Amstel, W. D. / van de Goor, P. F. A. / Horijon, J. L. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Al-Jumaily, G. A.

    Evaluating optical and supersmooth surface using AFM in optical manufacturing technology [4099-07]

    Li, J. / Xiao, S. / Li, X. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Al-Jumaily, G. A.

    Lithography: a look at what is ahead (Invited Paper) [4099-01]

    Levinson, H. J. / SPIE | British Library Conference Proceedings | 2000
    Beteiligte: Al-Jumaily, G. A.

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