Titel :

Microroughness analysis of thin film components for VUV applications [4099-13]

Beteiligte:

Ferre-Borrull, J. (Autor:in) / Duparre, A. (Autor:in) / Steinert, J. (Autor:in) / Ristau, D. (Autor:in) / Quesnel, E. (Autor:in) / Al-Jumaily, G. A. / SPIE

Kongress:

Conference, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2000 ; San Diego, CA

Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 82-90

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERINGG ; 4099

Erscheinungsdatum :

2000-01-01

Format / Umfang :

9 pages

ISBN :

0819437441

ISSN :

0277-786X

Medientyp :

Aufsatz (Konferenz)

Format :

Print

Sprache :

Englisch

Schlagwörter :

optical metrology , semiconductor industries , data storage industries

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