An overview is given of recent achievements of the Materials Processing Branch of the Short Wavelengths and Interactions with Materials (SWIM) program at Macquarie University. This research focuses on using short-pulsed UV lasers and other novel VUV sources to clean small particles (including sub-micron particles) and hydrocarbons from optical, optoelectronic and photonic materials.
Recent advances in UV and VUV cleaning of optical materials
2002-01-01
303164 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Recent Advances in UV and VUV Cleaning of Optical Materials
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