PICP dry etching power-off helium leakage detection equipment
PICP dry etching power-off helium leakage detection equipment
- Neue Suche nach: ZHAO HAO
- Neue Suche nach: JIN WEIMING
- Neue Suche nach: HE XINYU
- Neue Suche nach: ZHU CHUANBING
- Neue Suche nach: QIANG JUN
- Neue Suche nach: ZHAO HAO
- Neue Suche nach: JIN WEIMING
- Neue Suche nach: HE XINYU
- Neue Suche nach: ZHU CHUANBING
- Neue Suche nach: QIANG JUN
The invention provides PICP dry etching power-off helium leakage detection equipment, which is applied to the technical field of PICP dry etching, and is characterized in that an equipment frame (1) of the PICP dry etching power-off helium leakage detection equipment is provided with a detection plate fixed plate (3), a lifting part upper assembly (6) of a lifting part (2) comprises an upper lifting appliance (8) with a through hole, and a lifting part lower assembly (7) comprises a fixing base (9) arranged on the equipment frame (1); a rod piece (10) is arranged on the fixing base (9), a helium detection air exhaust component (30) is installed on the lower portion of the detection plate fixing plate (2) and communicated with a PICP power-off device (20), and a helium detector is communicated with the detection plate fixing plate (3). According to the PICP dry etching power-off helium leakage detection equipment, PICP power-off helium leakage detection can be conveniently and rapidly achieved, whether PICP power-offleakage exists in an electric product or not can be effectively judged, and the condition that the product cannot be used is avoided.
本发明提供一种应用于PICP干刻技术领域的PICP干刻下电氦漏检测设备，所述的PICP干刻下电氦漏检测设备的设备框架(1)上设置检测板定版(3)，起吊部件(2)的起吊部件上组件(6)包括带通孔的上吊具(8)，起吊部件下组件(7)包括设置在设备框架(1)上的固定座(9)，固定座(9)上设置杆件(10)，检测板定版(2)下部安装氦检抽气部件(30)，氦检抽气部件(30)与PICP下电(20)连通，氦检仪与检测板定版(3)连通，本发明的PICP干刻下电氦漏检测设备，能够方便快捷实现PICP下电的氦漏检测，有效完成PICP下电产品是否存在泄漏的判断，避免无法使用产品出厂情况出现。
Dokumentinformationen
PICP dry etching power-off helium leakage detection equipment
一种PICP干刻下电氦漏检测设备
2021-04-16
Patent
Elektronische Ressource
Chinesisch
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