Titel :

X-ray investigations of a near surface layer of metal samples [4099-33]

Beteiligte:

Gilev, O. N. (Autor:in) / Asadchikov, V. E. (Autor:in) / Duparre, A. (Autor:in) / Havronin, N. A. (Autor:in) / Kozhevnikov, I. V. (Autor:in) / Krivonosov, Y. S. (Autor:in) / Kuznetsov, S. P. (Autor:in) / Mikerov, V. I. (Autor:in) / Ostashev, V. I. (Autor:in) / Tukarev, V. A. (Autor:in)

Kongress:

Conference, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2000 ; San Diego, CA

Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 279-289

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERINGG ; 4099

Erscheinungsdatum :

2000-01-01

Format / Umfang :

11 pages

ISBN :

0819437441

ISSN :

0277-786X

Medientyp :

Aufsatz (Konferenz)

Format :

Print

Sprache :

Englisch

Schlagwörter :

optical metrology , semiconductor industries , data storage industries

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