Merging micro-optics with micromechanics: micro-opto-electro-mechanical (MOEM) devices
MOEM scan engine for bar code reading and factory automation (Invited Paper) [3276-06]
FPAs and thin film binary optic microlens integration (Invited Paper) [2687-09]
Optical transformer and collimator for efficient fiber coupling (Invited Paper) [3008-19]
Fabrication of microlens arrays by reactive ion milling [2687-19]
Design and fabrication issues in the development of monolithic micro-optical systems [2687-12]
Analysis of optical beam steering using phased micromirror arrays [2687-08]
Micromirror arrays for active optical aberration control [2687-02]
Microjet printing of anamorphic microlens arrays [2687-11]
Magnetically actuated MEMS scanning mirror [2687-06]
Recent achievements on MOEM systems at Micromachine Center (MMC) (Invited Paper) [2687-01]
Aspherization of cylindrical lenses by laser irradiation [2687-20]
Miniaturized optical switches based on piezoelectrically driven microprism arrays [2687-04]
Monolithically integrated refractive microlens standing perpendicular to the substrate [2687-21]
Micro-size ball lenses for micro-optics: theory and experiment (Invited Paper) [2687-13]
Optical network of silicon micromachined sensors [2687-10]