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    Surface Force in Electrostatic Type Microsensors and Microactuators

    Tsuchitani, S. / Suzuki, S. / Shimada, S. et al. | British Library Online Contents | 1994

    Measurement of the Surface Force in Micro Structures and Its Reduction

    Tsuchitani, S. / Suzuki, S. / Shimada, S. et al. | British Library Online Contents | 1994