High-precision measurements of the groove density of diffraction gratings [4146-16]
Present status of the ASET at-wavelength phase-shifting point diffraction interferometer [4146-05]
Optical layout of BACH: a beamline for advanced dichroism at Elettra [4146-15]
Illumination optics design for EUV lithography [4146-03]
High-resolution soft x-ray microscopy [4146-24]
Portable diagnostics for EUV light sources [4146-13]
Compact debris shutter design of a laser-produced plasma source for high-NA application [4146-14]
Extreme-ultraviolet source development: a comparison of different concepts [4146-12]
Si-based multilayers with high thermal stability [4146-23]