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Microelectromechanical systems
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keywords:("Microelectromechanical systems")
Monolithic Fabrication of 54.74 Degree Inclined Scanning Mirror and Optical benches
MOEMS Torsion Mirror Addressed Variable Optical Delay
MOEMS Reflective Type Variable Optical Attenuator using Solder Bond
MOEMS for Automotive Applications
Micro-Optical Characterization and Modeling of Microfluidic Self-assembly in Biology
Micro-mirror Arrays for Adaptive Optics Fabricated in Polymer Technology
Micro-machining Process for Optical Device Employing Pulse-modulated Electron-Beam-Excited Plasma
Micromachined Tunable Blazed Gratings
MEMS Tilting Platform for Filter Tuning in Optical Telecom
MEMS Optical Switches with High Impact Resistance