Synonyme wurden verwendet für:
Microelectromechanical systems
Suche ohne Synonyme:
keywords:("Microelectromechanical systems")
Wavelength Selective Variable Reflection Filters Using Movable Guided Mode Resonance Gratings
Virtual Particle Channels Based on Optical Dielectrophoresis Forces
Vibration Frequency Matching of Fiber-based interferometers for Mass Measurement
Vertical Micromirror Fabricated in (110) Silicon Device Layer by Combination of KOH and DRIE Etch
Two Dimensional Micro Manipulation Using Liquid Crystals
Two-dimensionally self-holding Deflector with SAW (Surface Acoustic Wave) Actuation
Tunable Polymer Fabry-Perot-Filters
Towards a High Performance Optical MEMS Devices Using Double-Side Processes on SOI Wafer
The Fabrication Processes for the Planarization of Sacrificial Layers over Hollow Structures