Synonyme wurden verwendet für: Microelectromechanical systems
Suche ohne Synonyme: keywords:("Microelectromechanical systems")

1–4 von 4 Ergebnissen
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    Optimization of Diffracted Light Probe Profile of 6-DOF Measurement Technology for Micro Manipulator

    Inoue, Y. / Ishimaru, I. / Hashiguti, G. et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    Measurement of Relative Position and Attitude of Micro-manipulator by Neighboring-points Confocal Measurement Method

    Kobayashi, H. / Ishimaru, I. / Mihara, Y. et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    Free-space Optical Switch Modules Using Risley Optical Beam Deflectors

    Matsui, T. / Oohira, F. / Hosogi, M. et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    Fabrication of Fresnel Lens Shape Using UV Light Exposure Technology with Tilting Rotary Stage

    Okada, K. / Oohira, F. / Hashiguchi, G. et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS