1–16 von 16 Ergebnissen
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    5 kHz high repetition rate excimer laser

    Takagi, S. / Kakizaki, K. / Okamoto, N. et al. | IEEE | 1995

    Development of VUV F/sub 2/ lasers excited by longitudinal discharge at very low pressure (40 torr)

    El-Osealy, M.A.M. / Jitsuno, T. / Nakamura, K. et al. | IEEE | 2001