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Synonyme wurden verwendet für: Microelectromechanical systems
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    WET And DRY Etching Combination to Improve Surface Roughness of Pyrex Glass Micro-Optical Waveguides Fabricated by Dicing Saw

    Camou, S. / Ueno, Y. / Tate, A. et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    Wavelength Selective Variable Reflection Filters Using Movable Guided Mode Resonance Gratings

    Kanamori, Y. / Kitani, T. / Hane, K. et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    Virtual Particle Channels Based on Optical Dielectrophoresis Forces

    Lui, Y.-S. / Chang, Y.-H. / Tseng, S.-P. et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    Vibration Frequency Matching of Fiber-based interferometers for Mass Measurement

    Cheng, B. / Chen, M.-L. / Huang, J.-Y. et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    Vertical Micromirror Fabricated in (110) Silicon Device Layer by Combination of KOH and DRIE Etch

    Lee, D. / Yu, K. / Krishnamoorthy, U. et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    Two Dimensional Micro Manipulation Using Liquid Crystals

    Mieda, Y. / Furutani, K. / IEEE et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    Two-dimensionally self-holding Deflector with SAW (Surface Acoustic Wave) Actuation

    Iseki, T. / Shigematsu, T. / Okumura, M. et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    Tunable Polymer Fabry-Perot-Filters

    Moench, W. / Dehnert, J. / Zappe, H. et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    Towards a High Performance Optical MEMS Devices Using Double-Side Processes on SOI Wafer

    Wu, M. / Lin, H.-Y. / Liu, P.-T. et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    The Fabrication Processes for the Planarization of Sacrificial Layers over Hollow Structures

    Yoon, Y. / bae, K. / Choi, H. et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    Surface Micromachined Elastomer Spatial Light Modulators for Extreme Ultra Violet Radiation

    Wang, J.-S. / Chen, Y. / Solgaard, O. et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    Surface Acoustic Wave Optical Deflector for Surface Plasmon Resonance Sensor

    Takahata, T. / Hoshino, K. / Matsumoto, K. et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    Spatial Mode Control in Microoptical Cavities using Shape-Tunable Mirrors

    Liu, W. / Talghader, J. J. / IEEE et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    Shape Determination of the Micro Manipulator for Multi Input-Output Optical Switches

    Bagheri, S. / Kamiya, D. / Horie, M. et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    Rotation Angle Sensor in Micromirror Device

    Sasaki, M. / Haga, T. / Hane, K. et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    Plasmonic Photonics

    Kawata, S. / IEEE / LEOS | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    Pitch-Variable Subwavelength Gratings Driven by Comb Actuators

    Kobayashi, T. / Kanamori, Y. / Hane, K. et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    Piezoelectric Micromirrors for Fast Optical Scanning with Large Angular Deflection

    Filhol, F. / Defay, E. / Divoux, C. et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    Optimization of Diffracted Light Probe Profile of 6-DOF Measurement Technology for Micro Manipulator

    Inoue, Y. / Ishimaru, I. / Hashiguti, G. et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

    Optically Assisted Electrostatic Actuation Mechanism

    Yamauchi, Y. / Higo, A. / Kakushima, K. et al. | British Library Conference Proceedings | 2004
    Schlagwörter: Optical MEMS

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