Mikromechanische Sensoren für Mechatronik

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Mikromechanische Sensoren für Mechatronik

Marek, J.

Slide presentation. The author first gives an overview about the sensor market for automotive applications. The market share of micromachined sensors is increasing. The airbag crash sensor is described. Its features: SMD-housing, small size, x, y, z-sensing possible in one package, improved self-test capabilities. Its trends are: size reduction, multi-axis devices, intelligent digital interfaces, 3.3 V power. Features of the side impact sensor are: capacitive sensor element, self-test, digital two-wire interface. Its trends are: size reduction, bus interface. The silicon micromachining technology was introduced in mid-90s as disruptive technology. It quickly became state-of-the-art by 2000. Benefits are: - silicon technology enables standard SMD packages, - small size, - reduced manufacturing cost vs. conventional technologies. Further shrink and size reduction are likely. Surface micromachining is described. The author outlines the application of angular rate sensors, drive mode and detection mode. High-pressure sensors for the application in direct injection are described. Bulk micromachining is reviewed. The following sensors are described as well: angular rate sensors, oil condition sensors.