Multi-Gas Sensor by Infrared Spectrometer

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Multi-Gas Sensor by Infrared Spectrometer

Enomoto, Tetsuya / Tanemura, Tomoki / Yamashita, Shuichi / Wado, Hiroyuki / Takeuchi, Yukihiro / Hattori, Yutaka

In order to detect many types of gases (CO₂, NO_x, SO_x, C₂H₅OH) in the automotive cabin by infrared absorption sensor, we developed a novel micro electro mechanical systems (MEMS) based Fabry–Perot spectrometer with an ultra wide wavelength range (3.20–8.40 μm) compared to previously reported spectrometers (typically 2.80–5.80 μm). The wavelength range of a Fabry–Perot spectrometer is known to increase by increasing the ratio of the refractive indices of the multilayer mirrors. Thus, a novel mirror structure was proposed replacing the low refractive index layer of SiO₂ (n_L = 1.44) with “air (n_L = 1.00)” for a wider wavelength range. To fabricate the proposed structure, the internal stress of the four ultra-thin polycrystalline silicon films (ca. 320 nm) was controlled tensile by the deposition temperature. A gas sensor was fabricated using our developed spectrometer. It was found that the sensor detected CO₂ and C₂H₅OH successfully.

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Dokumentinformationen

Titel :

Multi-Gas Sensor by Infrared Spectrometer

Weitere Titelangaben:

Lect. Notes Electrical Eng.

Beteiligte:

Enomoto, Tetsuya (Autor:in) / Tanemura, Tomoki (Autor:in) / Yamashita, Shuichi (Autor:in) / Wado, Hiroyuki (Autor:in) / Takeuchi, Yukihiro (Autor:in) / Hattori, Yutaka (Autor:in)

Erschienen in:

Proceedings of the FISITA 2012 World Automotive Congress ; Kapitel : 57 ; 611-620

Lecture Notes in Electrical Engineering ; 194

Erscheinungsdatum :

2012-10-26

Format / Umfang :

10 pages

ISBN :

978-3-642-33829-8 , 978-3-642-33828-1

ISSN :

1876-1119 , 1876-1100

DOI :