This paper studies the self-organized iron silicide nano dots on silicon [001] substrate. In the experiment, self-aligned (1D) iron disilicide quantum dots have been successfully grown by a UHV electron gun evaporation system with vacuum level better that 10/sup -9/ torr, using either Si/sub x/Ge/sub 1-x/ or strained Si as a substrate. JEOL 2010 and 4000EX transmission electron microscopes, operating at 200 and 400 KeV, were used to study the microstructures.


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    Titel :

    Self-organized iron silicide nano dots on silicon [001] substrate


    Beteiligte:
    Chou, L.J. (Autor:in) / Chuen, Y.L. (Autor:in)


    Erscheinungsdatum :

    2003-01-01


    Format / Umfang :

    104030 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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