Effects of annealing process on morphology and mechanical properties of magnetron sputtered LiCoO<sub>2</sub> thin films

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Effects of annealing process on morphology and mechanical properties of magnetron sputtered LiCoO₂ thin films

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MA Yibo / CHEN Mu / YAN Yue / ZHANG Xiaofeng / LIU Weiming / LI Jiaming / ZHANG Xuan

LiCoO₂ thin films were prepared on single crystal Si (100) by magnetron sputtering method and then annealed by different annealing temperatures, holding times and atmospheres. The effects of annealing processes on the surface morphologies, compositions, crystal structures and mechanical properties of LiCoO₂ films were investigated. The results show that the surface average roughness of LiCoO₂ film is reduced from 11.63 nm to 6.13 nm; annealing atmosphere has the greatest influence on the surface morphologies of LiCoO₂ films. The LiCoO₂ film composition is destroyed due to Li₂O, CoO, Co₃O₄ by-products formed during annealing process. LiCoO₂ film are crystallized under any annealing conditions, the average grain size is about 30 nm, annealing temperature has the greatest influence on the grain size and residual stress. After annealing, the hardness and young's modulus of LiCoO₂ films are increased by an order of magnitude. Under the optimal annealing process (600 ℃, 60 min, pure O₂ atmosphere), the ratio of H³/E_r² is 0.03 GPa, which shows excellent resistance to plastic deformation.

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Titel :

Effects of annealing process on morphology and mechanical properties of magnetron sputtered LiCoO₂ thin films

Beteiligte:

MA Yibo (Autor:in) / CHEN Mu (Autor:in) / YAN Yue (Autor:in) / ZHANG Xiaofeng (Autor:in) / LIU Weiming (Autor:in) / LI Jiaming (Autor:in) / ZHANG Xuan (Autor:in)

Erschienen in:

Journal of Aeronautical Materials, Vol 39, Iss 6, Pp 90-98 (2019)

Erscheinungsdatum :

2019

ISSN :

1005-5053

DOI :

https://doi.org/10.11868/j.issn.1005-5053.2019.000091

Medientyp :

Aufsatz (Zeitschrift)

Format :

Elektronische Ressource

Sprache :

Unbekannt

Schlagwörter :

licoo<sub>2</sub> film , surface topography , hardness , young’s modulus , friction coefficient , Motor vehicles. Aeronautics. Astronautics , TL1-4050

Metadata by DOAJ is licensed under CC BY-SA 1.0

Effects of annealing process on morphology and mechanical properties of magnetron sputtered LiCoO₂ thin films

Effects of annealing process on morphology and mechanical properties of magnetron sputtered LiCoO₂ thin films

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Effects of annealing process on morphology and mechanical properties of magnetron sputtered LiCoO2 thin films

Effects of annealing process on morphology and mechanical properties of magnetron sputtered LiCoO2 thin films

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Exportieren, teilen und zitieren

Dokumentinformationen

Ähnliche Titel

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Seitennavigation

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Effects of annealing process on morphology and mechanical properties of magnetron sputtered LiCoO₂ thin films

Effects of annealing process on morphology and mechanical properties of magnetron sputtered LiCoO₂ thin films