Characterization and optimization of a laser-produced x-ray source with a gas puff target [3767-02]
Conference, EUV, X-ray, and neutron optics and sources ; 1999 ; Denver, CO
1999-01-01
11 pages
Aufsatz (Konferenz)
Englisch
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DataCite | 1917
Polycapillary collimator for laser-generated plasma source x-ray lithography [3767-05]
British Library Conference Proceedings | 1999
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|Characterization of multifiber polycapillary x-ray collimating optics [3767-12]
British Library Conference Proceedings | 1999
|High-power source and illumination system for extreme ultraviolet lithography [3767-20]
British Library Conference Proceedings | 1999
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