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    Titel :

    Characterization and optimization of a laser-produced x-ray source with a gas puff target [3767-02]


    Beteiligte:
    Fiedorowicz, H. (Autor:in) / Bartnik, A. (Autor:in) / Jarocki, R. (Autor:in) / Rakowski, R. (Autor:in) / Szczurek, M. (Autor:in) / Daido, H. (Autor:in) / Sakaya, N. (Autor:in) / Suzuki, M. (Autor:in) / Nagatomo, H. (Autor:in) / Tang, H. (Autor:in)

    Kongress:

    Conference, EUV, X-ray, and neutron optics and sources ; 1999 ; Denver, CO



    Erscheinungsdatum :

    1999-01-01


    Format / Umfang :

    11 pages




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Nr. 3767

    DataCite | 1917


    Polycapillary collimator for laser-generated plasma source x-ray lithography [3767-05]

    Chen, Z. W. / Youngman, R. / Bievenue, T. et al. | British Library Conference Proceedings | 1999


    Characterization and optimization of a laser-produced x-ray source with a double-stream gas puff target [4504-10]

    Fiedorowicz, H. / Bartnik, A. / Jarocki, R. et al. | British Library Conference Proceedings | 2001


    Characterization of multifiber polycapillary x-ray collimating optics [3767-12]

    Padiyar, S. D. / Wang, H. / Gubarev, M. V. et al. | British Library Conference Proceedings | 1999


    High-power source and illumination system for extreme ultraviolet lithography [3767-20]

    Kubiak, G. D. / Bernardez, L. J. / Krenz, K. D. et al. | British Library Conference Proceedings | 1999